Substrate inspection apparatus and method of determining fault type of screen printer

• Main Authors: Lee, Duk Young, Park, Juyoun, Hwang, Ye Won, Lee, Seung Jae, Choi, Tae Min, Kim, Jong Hwan, Park, Jin Man, Yoo, Yong Ho
• Format: Patent
• Language: English
• Published: 20.12.2022
• Subjects: CALCULATING; COMPUTING; COUNTING; IMAGE DATA PROCESSING OR GENERATION, IN GENERAL; PHYSICS

A substrate inspection apparatus generates, when anomalies of a plurality of second solder pastes among a plurality of first solder pastes printed on a first substrate is detected, at least one image indicating a plurality of second solder pastes with anomalies detected by using an image about a first substrate, applies the at least one image to a machine-learning-based model, acquires a plurality of first values indicating relevance of respective first fault types to the at least one image and a plurality of first images indicating regions associated with one of a plurality of first fault types, determines a plurality of second fault types, which are associated with the plurality of second solder pastes by using the plurality of first values and the plurality of first images, and determines at least one third solder paste, which is associated with the respective second fault types.