Thin-film surface-acoustic-wave filter using lithium niobate
An apparatus is disclosed for a surface-acoustic-wave filter using lithium niobate (LiNbO3). In an example aspect, the apparatus includes at least one surface-acoustic-wave filter including an electrode structure, a substrate layer, and a piezoelectric layer disposed between the electrode structure...
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Main Authors | , |
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Format | Patent |
Language | English |
Published |
06.12.2022
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Subjects | |
Online Access | Get full text |
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Summary: | An apparatus is disclosed for a surface-acoustic-wave filter using lithium niobate (LiNbO3). In an example aspect, the apparatus includes at least one surface-acoustic-wave filter including an electrode structure, a substrate layer, and a piezoelectric layer disposed between the electrode structure and the substrate layer. The piezoelectric layer includes lithium niobate material configured to enable propagation of an acoustic wave across its planar surface in a direction along a first filter axis. A second filter axis is along the planar surface and perpendicular to the first filter axis. A third filter axis is normal to the planar surface. An orientation of the first, second, and third filter axes is relative to a crystalline structure of the lithium niobate material as defined by Euler angles λ, μ, and θ. A value of μ has a range approximately from −70° to −55° or at least one symmetrical equivalent. |
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Bibliography: | Application Number: US202017005208 |