Multifunctional polymers
A negative-tone resist composition is provided that contains a free photoacid generator and a multifunctional polymer covalently bound to a photoacid-generating moiety, where the composition is substantially free of cross-linking agents. Multifunctional polymers useful in conjunction with the resist...
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Main Authors | , , , , , , , , |
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Format | Patent |
Language | English |
Published |
15.11.2022
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Subjects | |
Online Access | Get full text |
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Summary: | A negative-tone resist composition is provided that contains a free photoacid generator and a multifunctional polymer covalently bound to a photoacid-generating moiety, where the composition is substantially free of cross-linking agents. Multifunctional polymers useful in conjunction with the resist composition are also provided, as is a process for generating a resist image on a substrate using the present compositions and polymers. |
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Bibliography: | Application Number: US201816158103 |