Method for operating a machine for microlithography
The invention relates to a method for operating a machine for microlithography which has a multiplicity of machine components. According to one aspect, malfunctions of these machine components that occur during the operation of the machine are each describable by a symptom, wherein the method includ...
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Main Authors | , |
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Format | Patent |
Language | English |
Published |
25.10.2022
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Subjects | |
Online Access | Get full text |
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