Method for operating a machine for microlithography

The invention relates to a method for operating a machine for microlithography which has a multiplicity of machine components. According to one aspect, malfunctions of these machine components that occur during the operation of the machine are each describable by a symptom, wherein the method includ...

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Bibliographic Details
Main Authors Kamp-Froese, Michael, Schnier, Dietmar
Format Patent
LanguageEnglish
Published 25.10.2022
Subjects
APPARATUS SPECIALLY ADAPTED THEREFOR
CALCULATING
CINEMATOGRAPHY
COMPUTING
COUNTING
ELECTRIC DIGITAL DATA PROCESSING
ELECTROGRAPHY
HOLOGRAPHY
MATERIALS THEREFOR
ORIGINALS THEREFOR
PHOTOGRAPHY
PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES
PHYSICS
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Summary:The invention relates to a method for operating a machine for microlithography which has a multiplicity of machine components. According to one aspect, malfunctions of these machine components that occur during the operation of the machine are each describable by a symptom, wherein the method includes the following steps: creating a database in which a cause is in each case assigned to different combinations of these symptoms, automatically recording the symptoms occurring within a predetermined time interval when a problem occurs during the operation of the machine and automatically assigning a cause to the problem on the basis of the recorded symptoms and the database.
Bibliography:Application Number: US201916291206