Phase change memory cell with a projection liner
A semiconductor structure may include a heater surrounded by a second dielectric layer, a projection liner on top of the second dielectric layer, and a phase change material layer above the projection liner. A top surface of the projection liner may be substantially flush with a top surface of the h...
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Main Authors | , , , , , , |
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Format | Patent |
Language | English |
Published |
18.10.2022
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Subjects | |
Online Access | Get full text |
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