Measurement probe

• Main Authors: Kubo, Keishi, Doi, Masateru, Okazaki, Makoto, Inoue, Takashi, Usui, Yukiya, Funabashi, Takanori
• Format: Patent
• Language: English
• Published: 18.10.2022
• Subjects: MEASURING; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS; MEASURING LENGTH, THICKNESS OR SIMILAR LINEARDIMENSIONS; PHYSICS; TESTING

A measurement probe of the present disclosure that scans a surface of a measurement object to measure a three-dimensional shape or the like of the surface of the measurement object includes a first movable portion having a stylus, a second movable portion that is connected to the first movable portion to be movable in a Z direction, a third movable portion that is connected to the second movable portion to be movable in the Z direction, a first position measurer that measures a first position of the first movable portion in the Z direction, a second position measurer that measures a second position of the second movable portion in the Z direction, and a third position measurer that measures a third position of the third movable portion in the Z direction. A first relative position is calculated based on the first position and the second position. A second relative position is calculated based on the first position and the third position. The first relative position of the second movable portion with respect to the first movable portion in the Z direction and the second relative position of the third movable portion with respect to the first movable portion in the Z direction are maintained constant.