Method to produce 3D semiconductor devices and structures with memory

• Main Authors: Or-Bach, Zvi, Sekar, Deepak C
• Format: Patent
• Language: English
• Published: 11.10.2022
• Subjects: BASIC ELECTRIC ELEMENTS; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; SEMICONDUCTOR DEVICES

A method for producing a 3D semiconductor device, the method comprising: providing a first level, said first level comprising a first single crystal layer; forming first alignment marks and control circuits in and/or on said first level, wherein said control circuits comprise first single crystal transistors, and wherein said control circuits comprise at least two interconnection metal layers; forming at least one second level disposed on top of said control circuits; performing a first etch step into said second level; and performing additional processing steps to form a plurality of first memory cells within said second level, wherein each of said memory cells comprise at least one second transistors, and wherein said additional processing steps comprise depositing a gate electrode for said second transistors.