VCSEL with self-aligned microlens to improve beam divergence

A vertical cavity surface emitting laser (VCSEL) device includes a microlens arranged over a reflector stack. The reflector stack includes alternating reflector layers of a first material and a second material. The microlens stack includes a first lens layer, a second lens layer arranged over the fi...

Full description

Saved in:
Bibliographic Details
Main Authors Chen, Jhih-Bin, Liu, Ming Chyi
Format Patent
LanguageEnglish
Published 06.09.2022
Subjects
BASIC ELECTRIC ELEMENTS
DEVICES USING STIMULATED EMISSION
ELECTRICITY
Online AccessGet full text

Cover

More Information
Summary:A vertical cavity surface emitting laser (VCSEL) device includes a microlens arranged over a reflector stack. The reflector stack includes alternating reflector layers of a first material and a second material. The microlens stack includes a first lens layer, a second lens layer arranged over the first lens layer, and a third lens layer arranged over the second lens layer. The first lens layer includes a first average concentration of a first element and has a first width. The second lens layer includes a second average concentration of the first element greater than the first average concentration and has a second width smaller than the first width. The third lens layer includes a third average concentration of the first element greater than the second average concentration and has a third width smaller than the second width.
Bibliography:Application Number: US201916579692