Protective sealant for chalcogenide material and methods for forming the same
Techniques are described to form a liner to protect a material, such as a storage element material, from damage during subsequent operations or phases of a manufacturing process. The liner may be bonded to the material (e.g., a chalcogenide material) using a strong bond or a weak bond. In some cases...
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Main Authors | , , |
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Format | Patent |
Language | English |
Published |
16.08.2022
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Subjects | |
Online Access | Get full text |
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Summary: | Techniques are described to form a liner to protect a material, such as a storage element material, from damage during subsequent operations or phases of a manufacturing process. The liner may be bonded to the material (e.g., a chalcogenide material) using a strong bond or a weak bond. In some cases, a sealant material may be deposited during an etching phase of the manufacturing process to prevent subsequent etching operations from damaging a material that has just been etched. |
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Bibliography: | Application Number: US201916731963 |