Workpiece placement apparatus and processing apparatus
A placement apparatus for placing a workpiece is provided. The placement apparatus includes a stage on which a workpiece can be placed in a processing vessel; an edge ring including a locking part which is disposed on the stage so as to surround a periphery of the workpiece; a conductive connecting...
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Main Authors | , , , |
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Format | Patent |
Language | English |
Published |
09.08.2022
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Subjects | |
Online Access | Get full text |
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Summary: | A placement apparatus for placing a workpiece is provided. The placement apparatus includes a stage on which a workpiece can be placed in a processing vessel; an edge ring including a locking part which is disposed on the stage so as to surround a periphery of the workpiece; a conductive connecting member connected with the edge ring at the locking part; and a first contacting member configured to cause the edge ring to contact the stage, while the edge ring is connected with the connecting member. |
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Bibliography: | Application Number: US201916293788 |