Method of manufacturing display apparatus

• Main Authors: Sung, Sijin, Han, Jongseok, Park, Illsoo, Kim, Hyomin, Yoo, Gina
• Format: Patent
• Language: English
• Published: 02.08.2022
• Subjects: ELECTRICITY

A method of manufacturing a display apparatus includes: forming a pixel electrode on a substrate; forming a pixel defining layer covering at least an edge of the pixel electrode and including an opening exposing a part of the pixel electrode; performing first dry cleaning by adding oxygen gas (O2) to a surface of the pixel electrode exposed by the opening in the pixel defining layer, wherein the oxygen gas (O2) is added at a flow rate in a range of about 1,200 sccm to about 3,600 sccm; performing second dry cleaning after the first dry cleaning; forming an intermediate layer on the pixel electrode after the second dry cleaning; and forming an opposite electrode on the intermediate layer and the pixel defining layer.