Method of manufacturing display apparatus
A method of manufacturing a display apparatus includes: forming a pixel electrode on a substrate; forming a pixel defining layer covering at least an edge of the pixel electrode and including an opening exposing a part of the pixel electrode; performing first dry cleaning by adding oxygen gas (O2) t...
Saved in:
Main Authors | , , , , |
---|---|
Format | Patent |
Language | English |
Published |
02.08.2022
|
Subjects | |
Online Access | Get full text |
Cover
Loading…
Summary: | A method of manufacturing a display apparatus includes: forming a pixel electrode on a substrate; forming a pixel defining layer covering at least an edge of the pixel electrode and including an opening exposing a part of the pixel electrode; performing first dry cleaning by adding oxygen gas (O2) to a surface of the pixel electrode exposed by the opening in the pixel defining layer, wherein the oxygen gas (O2) is added at a flow rate in a range of about 1,200 sccm to about 3,600 sccm; performing second dry cleaning after the first dry cleaning; forming an intermediate layer on the pixel electrode after the second dry cleaning; and forming an opposite electrode on the intermediate layer and the pixel defining layer. |
---|---|
Bibliography: | Application Number: US202016999749 |