Vibrator device, circuit device, method of manufacturing vibrator device, electronic apparatus, and vehicle

A vibrator device includes a vibrator having a first and second electrode, and a circuit device having a drive circuit adapted to drive the vibrator, and an output circuit adapted to output a monitor signal corresponding to a vibration characteristic of the vibrator while driven by the drive circuit...

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Bibliographic Details
Main Author Kiya, Hiroshi
Format Patent
LanguageEnglish
Published 10.05.2022
Subjects
BASIC ELECTRONIC CIRCUITRY
ELECTRICITY
GYROSCOPIC INSTRUMENTS
IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS
MEASURING
MEASURING DISTANCES, LEVELS OR BEARINGS
NAVIGATION
PHOTOGRAMMETRY OR VIDEOGRAMMETRY
PHYSICS
RESONATORS
SURVEYING
TESTING
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Summary:A vibrator device includes a vibrator having a first and second electrode, and a circuit device having a drive circuit adapted to drive the vibrator, and an output circuit adapted to output a monitor signal corresponding to a vibration characteristic of the vibrator while driven by the drive circuit. The circuit device includes a first terminal electrically connected to the first electrode, and from which an output signal from the drive circuit to the vibrator is output, a second terminal electrically connected to the second electrode, and to which an input signal from the vibrator to the drive circuit is input, a third terminal electrically separated from the first electrode and the second electrode, and a monitor terminal from which the monitor signal is output. The vibrator is supported on an active surface side of the circuit device using conductive bumps respectively to the first, second, and third terminal.
Bibliography:Application Number: US201916242129