Production device and production method of electronic grade hydrofluoric acid

Disclosed is a production device and production method of electronic grade hydrofluoric acid. The method includes vaporizing the raw material industrial anhydrous hydrogen fluoride by an evaporator, transporting the vaporized hydrogen fluoride to a purification tower, obtaining a high purity hydroge...

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Bibliographic Details
Main Author Li, Qunsheng
Format Patent
LanguageEnglish
Published 10.05.2022
Subjects
CHEMISTRY
COMPOUNDS THEREOF
INORGANIC CHEMISTRY
METALLURGY
NON-METALLIC ELEMENTS
PERFORMING OPERATIONS
PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
SEPARATION
TRANSPORTING
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Summary:Disclosed is a production device and production method of electronic grade hydrofluoric acid. The method includes vaporizing the raw material industrial anhydrous hydrogen fluoride by an evaporator, transporting the vaporized hydrogen fluoride to a purification tower, obtaining a high purity hydrogen fluoride gas through rectification, transporting the high purity hydrogen fluoride gas to an absorption tower for absorption by a certain concentration of hydrofluoric acid in the liquid phase, obtaining the crude electronic grade hydrofluoric acid, and obtaining the electronic grade hydrofluoric acid product through ultrapure filtration. The disclosure overcomes the technical problems of small yield and low purity of the prior art. The production process meets the requirements of environmental protection. The disclosure is suitable for industrialized large-scale production.
Bibliography:Application Number: US202017031943