Piezoelectric element and liquid ejecting head

Provided is a piezoelectric element including a first electrode provided above a substrate, a piezoelectric layer including a plurality of crystal grains containing potassium, sodium, and niobium and provided above the first electrode, and a second electrode provided above the piezoelectric layer. A...

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Bibliographic Details
Main Authors Koike, Harunobu, Morozumi, Koichi
Format Patent
LanguageEnglish
Published 19.04.2022
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Summary:Provided is a piezoelectric element including a first electrode provided above a substrate, a piezoelectric layer including a plurality of crystal grains containing potassium, sodium, and niobium and provided above the first electrode, and a second electrode provided above the piezoelectric layer. An atom concentration NK1 (atm %) of potassium contained in grain boundaries of the crystal grains and an atom concentration NK2 (atm %) of potassium contained in the crystal grains satisfy a relationship of 1.0<NK1/NK2≤2.4.
Bibliography:Application Number: US201916285664