Piezoelectric element and liquid ejecting head
Provided is a piezoelectric element including a first electrode provided above a substrate, a piezoelectric layer including a plurality of crystal grains containing potassium, sodium, and niobium and provided above the first electrode, and a second electrode provided above the piezoelectric layer. A...
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Main Authors | , |
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Format | Patent |
Language | English |
Published |
19.04.2022
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Subjects | |
Online Access | Get full text |
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Summary: | Provided is a piezoelectric element including a first electrode provided above a substrate, a piezoelectric layer including a plurality of crystal grains containing potassium, sodium, and niobium and provided above the first electrode, and a second electrode provided above the piezoelectric layer. An atom concentration NK1 (atm %) of potassium contained in grain boundaries of the crystal grains and an atom concentration NK2 (atm %) of potassium contained in the crystal grains satisfy a relationship of 1.0<NK1/NK2≤2.4. |
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Bibliography: | Application Number: US201916285664 |