Metal fuse and self-aligned gate edge (SAGE) architecture having a metal fuse

• Main Authors: Bambery, Rohan K, Hafez, Walid M, Wu, Mong-Kai
• Format: Patent
• Language: English
• Published: 29.03.2022
• Subjects: BASIC ELECTRIC ELEMENTS; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; SEMICONDUCTOR DEVICES

Metal fuses and self-aligned gate edge (SAGE) architectures having metal fuses are described. In an example, an integrated circuit structure includes a plurality of semiconductor fins protruding through a trench isolation region above a substrate. A first gate structure is over a first of the plurality of semiconductor fins. A second gate structure is over a second of the plurality of semiconductor fins. A gate edge isolation structure is laterally between and in contact with the first gate structure and the second gate structure. The gate edge isolation structure is on the trench isolation region and extends above an uppermost surface of the first gate structure and the second gate structure. A metal fuse is on the gate edge isolation structure.