Lithographic apparatus and method

A lithographic apparatus is disclosed that includes a substrate table configured to support a substrate on a substrate supporting area and a heater and/or temperature sensor on a surface adjacent the substrate supporting area.

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Bibliographic Details
Main Authors Laurent, Thibault Simon Mathieu, Kunnen, Johan Gertrudis Cornelis, Ottens, Joost Jeroen, Jacobs, Johannes Henricus Wilhelmus, Knarren, Bastiaan Andreas Wilhelmus Hubertus, Remie, Marinus Jan, Voogd, Robbert Jan, Nino, Giovanni Francisco, Ten Kate, Nicolaas
Format Patent
LanguageEnglish
Published 22.03.2022
Subjects
APPARATUS SPECIALLY ADAPTED THEREFOR
CINEMATOGRAPHY
ELECTROGRAPHY
HOLOGRAPHY
MATERIALS THEREFOR
ORIGINALS THEREFOR
PHOTOGRAPHY
PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES
PHYSICS
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Abstract A lithographic apparatus is disclosed that includes a substrate table configured to support a substrate on a substrate supporting area and a heater and/or temperature sensor on a surface adjacent the substrate supporting area.
AbstractList A lithographic apparatus is disclosed that includes a substrate table configured to support a substrate on a substrate supporting area and a heater and/or temperature sensor on a surface adjacent the substrate supporting area.
Author Ten Kate, Nicolaas
Remie, Marinus Jan
Voogd, Robbert Jan
Ottens, Joost Jeroen
Jacobs, Johannes Henricus Wilhelmus
Nino, Giovanni Francisco
Laurent, Thibault Simon Mathieu
Knarren, Bastiaan Andreas Wilhelmus Hubertus
Kunnen, Johan Gertrudis Cornelis
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– fullname: Jacobs, Johannes Henricus Wilhelmus
– fullname: Knarren, Bastiaan Andreas Wilhelmus Hubertus
– fullname: Remie, Marinus Jan
– fullname: Voogd, Robbert Jan
– fullname: Nino, Giovanni Francisco
– fullname: Ten Kate, Nicolaas
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Snippet A lithographic apparatus is disclosed that includes a substrate table configured to support a substrate on a substrate supporting area and a heater and/or...
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SubjectTerms APPARATUS SPECIALLY ADAPTED THEREFOR
CINEMATOGRAPHY
ELECTROGRAPHY
HOLOGRAPHY
MATERIALS THEREFOR
ORIGINALS THEREFOR
PHOTOGRAPHY
PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES
PHYSICS
Title Lithographic apparatus and method
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