Electrostatically actuated device

The present invention relates to an electrostatically actuated device comprising at least first chamber, an electrode chamber comprising a deformable electrode. The deformable electrode is disposed in the electrode chamber such as to form a first electrode chamber and a second electrode chamber.

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Bibliographic Details
Main Author Berge, Bruno
Format Patent
LanguageEnglish
Published 22.03.2022
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Summary:The present invention relates to an electrostatically actuated device comprising at least first chamber, an electrode chamber comprising a deformable electrode. The deformable electrode is disposed in the electrode chamber such as to form a first electrode chamber and a second electrode chamber.
Bibliography:Application Number: US201716329599