Apparatus for stressing semiconductor substrates
Apparatus for use in preparing heterostructures having a reduced concentration of defects including apparatus for stressing semiconductor substrates to allow them to conform to a crystal having a different crystal lattice constant.
Saved in:
Main Authors | , , , |
---|---|
Format | Patent |
Language | English |
Published |
15.03.2022
|
Subjects | |
Online Access | Get full text |
Cover
Loading…
Summary: | Apparatus for use in preparing heterostructures having a reduced concentration of defects including apparatus for stressing semiconductor substrates to allow them to conform to a crystal having a different crystal lattice constant. |
---|---|
Bibliography: | Application Number: US201916438003 |