MEMS electrostatic actuator with linearized displacements

A microelectromechanical actuator for a light beam steering device is provided that includes memory cells coupled to at least one electronic circuitry component and electrode segments coupled to a respective one of the memory cells via the at least one electronic circuitry component. A flexible meta...

Full description

Saved in:
Bibliographic Details
Main Authors McDonald, William Craig, Hall, James Norman
Format Patent
LanguageEnglish
Published 22.02.2022
Subjects
CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
GENERATION
OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
OPTICS
PHYSICS
Online AccessGet full text

Cover

More Information
Summary:A microelectromechanical actuator for a light beam steering device is provided that includes memory cells coupled to at least one electronic circuitry component and electrode segments coupled to a respective one of the memory cells via the at least one electronic circuitry component. A flexible metal layer having support pillars is on the electrode segments. Flexible beams are attached to the support pillars and a movable electrode attaches to the flexible beams. A mirror is attached to the movable electrode. When one or more of the electrode segments is activated, the mirror is displaced a distance to steer a light beam output from a light source in a direction.
Bibliography:Application Number: US201816233812