Control method of driving frequency of pulsed variable frequency RF generator

A frequency tuning impedance matching method includes analyzing a start driving frequency, set by a user, and an RF output signal to vary a driving frequency. Specifically, a next frequency may be predicted using susceptance which is an imaginary part of measured admittance in an n-th pulse. Accordi...

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Bibliographic Details
Main Authors Kim, Hanam, Kim, Jongmin, Leung, Ka Sing, Lee, Changhee, Huh, Jin
Format Patent
LanguageEnglish
Published 08.02.2022
Subjects
BASIC ELECTRIC ELEMENTS
BASIC ELECTRONIC CIRCUITRY
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
ELECTRICITY
IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS
RESONATORS
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Summary:A frequency tuning impedance matching method includes analyzing a start driving frequency, set by a user, and an RF output signal to vary a driving frequency. Specifically, a next frequency may be predicted using susceptance which is an imaginary part of measured admittance in an n-th pulse. Accordingly, impedance matching may be completed at high speed or an optimal frequency may be reached at high speed.
Bibliography:Application Number: US201916484062