Process for producing chlorosilanes using a catalyst selected from the group of Co, Mo, W
Generally unusable or difficultly useable dusts of ultrahigh purity silicon can be used to produce chlorosilanes under reasonable reaction conditions by employing a catalyst containing one or more of Co, Mo, W. The process may be incorporated into an integral plant for the production of polycrystall...
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Main Authors | , , |
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Format | Patent |
Language | English |
Published |
14.12.2021
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Subjects | |
Online Access | Get full text |
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Summary: | Generally unusable or difficultly useable dusts of ultrahigh purity silicon can be used to produce chlorosilanes under reasonable reaction conditions by employing a catalyst containing one or more of Co, Mo, W. The process may be incorporated into an integral plant for the production of polycrystalline silicon. |
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Bibliography: | Application Number: US201716753935 |