Dual valve fluid actuator assembly

A stage assembly (10) includes a stage (14), and a fluid actuator assembly (24) that moves the stage (14). The fluid actuator assembly (24) includes a piston housing (32) that defines a piston chamber (34); (ii) a piston (36) that separates the piston chamber (34) into a first chamber (34A) and a se...

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Bibliographic Details
Main Authors Poon, Alex Ka Tim, Yang, Pai-Hsueh, Lee, Sandy, Keswani, Gaurav, Choi, Yeong-Jun, Mai, Rocky
Format Patent
LanguageEnglish
Published 17.08.2021
Subjects
BLASTING
DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
FLUID-PRESSURE ACTUATORS
FLUID-PRESSURE ACTUATORS, e.g. SERVO-MOTORS
HEATING
HYDRAULICS OR PNEUMATICS IN GENERAL
LIGHTING
MECHANICAL ENGINEERING
SYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL
WEAPONS
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Summary:A stage assembly (10) includes a stage (14), and a fluid actuator assembly (24) that moves the stage (14). The fluid actuator assembly (24) includes a piston housing (32) that defines a piston chamber (34); (ii) a piston (36) that separates the piston chamber (34) into a first chamber (34A) and a second chamber (34B); (iii) a supply valve (38C) that controls the flow of the working fluid (40) into the first chamber (34A); and (iv) an exhaust valve (38D) that controls the flow of the working fluid (40) out of the first chamber (34A). The supply valve (38C) has a supply orifice (250G) having a supply orifice area, and the exhaust valve (38D) has an exhaust orifice (352G) having an exhaust orifice area. Moreover, the supply orifice area is different from the exhaust orifice area. Further multiple valves of different sizes can be used in combination for the supply and exhaust for each chamber (34A), (34B).
Bibliography:Application Number: US201816485406