Semiconductor device, method of manufacturing semiconductor device, inverter circuit, driving device, vehicle, and elevator

• Main Authors: Kimoto, Shinichi, Kyogoku, Shinya, Tanaka, Katsuhisa, Iijima, Ryosuke
• Format: Patent
• Language: English
• Published: 20.07.2021
• Subjects: BASIC ELECTRIC ELEMENTS; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; SEMICONDUCTOR DEVICES

A semiconductor device according to an embodiment includes: a SiC layer having a first plane, a second plane, a first trench located on a first plane side, an n-type first SiC region, a p-type second SiC region between the first SiC region and the first plane, an n-type third SiC region between the...