Method of testing an interconnection substrate and apparatus for performing the same

In a method of testing an interconnection substrate, a blocking condition of a reference light reflected from a probe having an intrinsic optical characteristic may be set. An electric field emitted from a test interconnection substrate having a plurality of circuits may change the intrinsic optical...

Full description

Saved in:
Bibliographic Details
Main Authors Lim, Mee-Hyun, Kim, Sung-Yeol, Cho, Seong-Keun, Joo, Won-Don, Kim, Taek-Jin, Lee, Sang-Min, Kim, Jae-Hong, Lee, Kyung-Min
Format Patent
LanguageEnglish
Published 29.06.2021
Subjects
INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES
MEASURING
MEASURING ELECTRIC VARIABLES
MEASURING MAGNETIC VARIABLES
PHYSICS
TESTING
Online AccessGet full text

Cover

More Information
Summary:In a method of testing an interconnection substrate, a blocking condition of a reference light reflected from a probe having an intrinsic optical characteristic may be set. An electric field emitted from a test interconnection substrate having a plurality of circuits may change the intrinsic optical characteristics of the probe into test optical characteristics. Light may be irradiated to the probe having the test optical characteristics. The reference light reflected from the probe having the test optical characteristic may be blocked in accordance with the blocking condition. The remaining reflected light that may be due to an abnormal circuit may be detected.
Bibliography:Application Number: US201916437675