Turbo molecular pump for mass spectrometer

The invention relates to turbo molecular pumps enabling high pumping speed. The disclosure suggests using one or more cage-like rotor stages to optimize pumping speed on vacuum systems with low gas flows and low ultimate pressures. This allows for a smaller motor as well as smaller overall form fact...

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Bibliographic Details
Main Authors Steiner, Urs, Franzen, Jochen
Format Patent
LanguageEnglish
Published 15.06.2021
Subjects
BASIC ELECTRIC ELEMENTS
BLASTING
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
ELECTRICITY
HEATING
LIGHTING
MECHANICAL ENGINEERING
NON-POSITIVE DISPLACEMENT PUMPS
POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS
PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
WEAPONS
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Summary:The invention relates to turbo molecular pumps enabling high pumping speed. The disclosure suggests using one or more cage-like rotor stages to optimize pumping speed on vacuum systems with low gas flows and low ultimate pressures. This allows for a smaller motor as well as smaller overall form factor and makes it well suited, in particular, for compact mass spectrometers and desk-top mass spectrometers.
Bibliography:Application Number: US201916525165