Optical element for the beam guidance of imaging light in projection lithography
An optical element is configured to guide imaging light in projection lithography. The optical element has a main body and at least one optical surface carried by the main body. At least one compensation weight element, which is attached to the main body, serves for a weight compensation of a figure...
Saved in:
Main Authors | , , |
---|---|
Format | Patent |
Language | English |
Published |
08.06.2021
|
Subjects | |
Online Access | Get full text |
Cover
Loading…
Summary: | An optical element is configured to guide imaging light in projection lithography. The optical element has a main body and at least one optical surface carried by the main body. At least one compensation weight element, which is attached to the main body, serves for a weight compensation of a figure deformation of the optical surface caused by gravity. This results in an optical element with a small figure deformation at the use location. |
---|---|
Bibliography: | Application Number: US202016735883 |