Flow rate ratio control device with flow velocity control mode

• Main Authors: Dick, John Thomas, Yasuda, Tadahiro, White, William Wylie, Gundlach, Maximilian Martin, Ebert, Brian James, Lowery, Patrick Allen
• Format: Patent
• Language: English
• Published: 04.05.2021
• Subjects: CONTROLLING; MEASURING; MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUIDLEVEL; METERING BY VOLUME; PHYSICS; REGULATING; SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES; TESTING

A flow rate ratio control device is provided with a main flow path, a plurality of branch flow paths that branch off from a terminus of the main flow path, a plurality of fluid control devices that are provided respectively on each branch flow path, and that are each equipped with a valve and a pressure-based flow rate sensor that is disposed downstream of the valve, and an operation setting unit that establishes settings such that, based on the target flow rate ratio, any one fluid control device from among the plurality of fluid control devices is made to operate in a flow velocity control mode in which the flow velocity of a fluid is controlled upstream of each valve, and the remaining fluid control devices are made to operate in a flow rate control mode in which the flow rate is controlled based on the target flow rates.