Closed-loop automatic defect inspection and classification
Inspection apparatus includes an imaging module, which is configured to capture images of defects at different, respective locations on a sample. A processor is coupled to process the images so as to automatically assign respective classifications to the defects, and to autonomously control the imag...
Saved in:
Main Authors | , , |
---|---|
Format | Patent |
Language | English |
Published |
26.01.2021
|
Subjects | |
Online Access | Get full text |
Cover
Loading…
Summary: | Inspection apparatus includes an imaging module, which is configured to capture images of defects at different, respective locations on a sample. A processor is coupled to process the images so as to automatically assign respective classifications to the defects, and to autonomously control the imaging module to continue capturing the images responsively to the assigned classifications. |
---|---|
Bibliography: | Application Number: US201816174070 |