Ceramic pressure measurement cell having at least one temperature transducer and pressure sensor having a pressure measurement cell of this type

• Main Authors: Uehlin, Thomas, Rossberg, Andreas, Schleiferbock, Jan, Ponath, Nils
• Format: Patent
• Language: English
• Published: 05.01.2021
• Subjects: MEASURING; MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER,MECHANICAL EFFICIENCY, OR FLUID PRESSURE; MEASURING QUANTITY OF HEAT; MEASURING TEMPERATURE; PHYSICS; TESTING; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR

A pressure measurement cell comprises: a ceramic counter body; a ceramic measuring diaphragm which is joined in a pressure-tight manner with the counter body, creating a measurement chamber between the counter body and the measuring diaphragm, by means of a circumferential joint. The measuring diaphragm can be deformed by a pressure to be measured; an electrical converter for converting a pressure-dependent deformation of the measuring diaphragm into an electrical signal; and a temperature transducer for providing at least one electrical signal dependent on a temperature or on a temperature gradient of the pressure measurement cell. The temperature transducer comprises at least one first thermocouple having a galvanic contact between a first conductor with an electrically conductive material and a second conductor with at least one second electrically conductive material.