Integrated circuit devices having raised via contacts and methods of fabricating the same

Methods of fabricating an integrated circuit device are provided. The integrated circuit device includes a transistor formed on a substrate. The transistor includes a source region, a drain region, and a gate structure between the source region and the drain region. The integrated circuit device als...

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Bibliographic Details
Main Authors Chen, Jyh-Huei, Tsai, Kuo-Chiang, Cheng, Jye-Yen
Format Patent
LanguageEnglish
Published 17.11.2020
Subjects
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