Micromechanical yaw rate sensor and method for the production thereof

A micromechanical yaw rate sensor includes a substrate and a rotationally oscillating mass having a rotationally oscillating mass bearing. The rotationally oscillating mass bearing includes a rocker bar, a rocker spring rod which resiliently connects the rocker bar to the substrate, and two support...

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Bibliographic Details
Main Authors Ohms, Torsten, Neul, Reinhard, Schmidt, Benjamin, Maul, Robert, Hattass, Mirko, Scheben, Rolf, Hoeppner, Christian, Heuck, Friedjof, Pruetz, Odd-Axel
Format Patent
LanguageEnglish
Published 25.08.2020
Subjects
GYROSCOPIC INSTRUMENTS
MEASURING
MEASURING DISTANCES, LEVELS OR BEARINGS
NAVIGATION
PHOTOGRAMMETRY OR VIDEOGRAMMETRY
PHYSICS
SURVEYING
TESTING
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Summary:A micromechanical yaw rate sensor includes a substrate and a rotationally oscillating mass having a rotationally oscillating mass bearing. The rotationally oscillating mass bearing includes a rocker bar, a rocker spring rod which resiliently connects the rocker bar to the substrate, and two support spring rods which resiliently connect, on opposite sides of the rocker spring rod, the rocker bar to the rotationally oscillating mass.
Bibliography:Application Number: US201615775321