Bulk acoustic wave resonator and method for manufacturing the same

A bulk acoustic wave resonator includes a substrate protective layer disposed on a top surface of a substrate, a cavity defined by a membrane layer and the substrate, and a resonating part disposed on the membrane layer. The membrane layer includes a first layer and a second layer, the second layer...

Full description

Saved in:
Bibliographic Details
Main Authors Son, Jin Suk, Yi, Sang Hyun, Lee, Hwa Sun, Kyoung, Je Hong
Format Patent
LanguageEnglish
Published 14.07.2020
Subjects
BASIC ELECTRONIC CIRCUITRY
ELECTRICITY
IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS
RESONATORS
Online AccessGet full text

Cover

More Information
Summary:A bulk acoustic wave resonator includes a substrate protective layer disposed on a top surface of a substrate, a cavity defined by a membrane layer and the substrate, and a resonating part disposed on the membrane layer. The membrane layer includes a first layer and a second layer, the second layer having the same material as the first layer and having a density greater than that of the first layer.
Bibliography:Application Number: US201715704225