Extraction body for lithographic apparatus

An extraction body for a support apparatus of a lithographic apparatus. The support apparatus is configured to support an object. The extraction body is formed with an opening at a surface thereof. The opening extends within the extraction body forming a first passageway. The first passageway is con...

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Main Authors Laurent, Thibault Simon Mathieu, Ravensbergen, Simon Karel, Tromp, Siegfried Alexander, Roset, Niek Jacobus Johannes, Houben, Martijn, Waterson, Nicholas Peter, Kramer, Gijs, Vermeulen, Marcus Martinus Petrus Adrianus, Gerritzen, Justin Johannes Hermanus, Cloosterman, Vincentius Fransiscus, Van De Vijver, Yuri Johannes Gabriël, Baltis, Coen Hubertus Matheus
Format Patent
LanguageEnglish
Published 07.07.2020
Subjects
APPARATUS SPECIALLY ADAPTED THEREFOR
CINEMATOGRAPHY
ELECTROGRAPHY
HOLOGRAPHY
MATERIALS THEREFOR
ORIGINALS THEREFOR
PHOTOGRAPHY
PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES
PHYSICS
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Summary:An extraction body for a support apparatus of a lithographic apparatus. The support apparatus is configured to support an object. The extraction body is formed with an opening at a surface thereof. The opening extends within the extraction body forming a first passageway. The first passageway is configured to fluidly communicate an extraction channel in the extraction body to liquid between the surface and the object. A first pressure in the extraction channel is less than ambient pressure. At least a part of the first passageway is sized and dimensioned such that when the liquid enters the first passageway via the opening, a second pressure in the first passageway associated with surface tension of the liquid is lower than the first pressure such that at least a portion of the liquid is retained in the first passageway.
Bibliography:Application Number: US201716097640