Fluidized bed reactor and process for producing polycrystalline silicon granules
Contamination of fluidized bed-produced polycrystalline granules by phosphorus is reduced by employing as seals and/or packings, graphite containing <500 ppmw of phosphorus.
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Main Authors | , |
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Format | Patent |
Language | English |
Published |
28.04.2020
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Subjects | |
Online Access | Get full text |
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Summary: | Contamination of fluidized bed-produced polycrystalline granules by phosphorus is reduced by employing as seals and/or packings, graphite containing <500 ppmw of phosphorus. |
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Bibliography: | Application Number: US201515522444 |