Fluidized bed reactor and process for producing polycrystalline silicon granules

Contamination of fluidized bed-produced polycrystalline granules by phosphorus is reduced by employing as seals and/or packings, graphite containing <500 ppmw of phosphorus.

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Bibliographic Details
Main Authors Weckesser, Dirk, Forstpointner, Gerhard
Format Patent
LanguageEnglish
Published 28.04.2020
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Summary:Contamination of fluidized bed-produced polycrystalline granules by phosphorus is reduced by employing as seals and/or packings, graphite containing <500 ppmw of phosphorus.
Bibliography:Application Number: US201515522444