Solid electrolyte carbon dioxide sensor and manufacturing method thereof

A solid electrolyte CO2 sensor may include a solid electrolyte bonded to a substrate to join and seal the substrate, a sensing electrode formed at a first side of the solid electrolyte, and a reference electrode formed between a second side of the solid electrolyte and one surface of the substrate,...

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Main Authors Kim, Yang-Ki, Sohn, Hyun-Soo, Kwon, Jong-Min, Kim, Ji-Hye, Lee, Tae-Won, Oh, Sun-Mi
Format Patent
LanguageEnglish
Published 31.03.2020
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Summary:A solid electrolyte CO2 sensor may include a solid electrolyte bonded to a substrate to join and seal the substrate, a sensing electrode formed at a first side of the solid electrolyte, and a reference electrode formed between a second side of the solid electrolyte and one surface of the substrate, and sealed by the solid electrolyte and the substrate.
Bibliography:Application Number: US201615365724