Solid electrolyte carbon dioxide sensor and manufacturing method thereof
A solid electrolyte CO2 sensor may include a solid electrolyte bonded to a substrate to join and seal the substrate, a sensing electrode formed at a first side of the solid electrolyte, and a reference electrode formed between a second side of the solid electrolyte and one surface of the substrate,...
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Main Authors | , , , , , |
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Format | Patent |
Language | English |
Published |
31.03.2020
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Subjects | |
Online Access | Get full text |
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Summary: | A solid electrolyte CO2 sensor may include a solid electrolyte bonded to a substrate to join and seal the substrate, a sensing electrode formed at a first side of the solid electrolyte, and a reference electrode formed between a second side of the solid electrolyte and one surface of the substrate, and sealed by the solid electrolyte and the substrate. |
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Bibliography: | Application Number: US201615365724 |