Radiation source having debris control

• Main Authors: De Jong, Arjen Teake, Kleemans, Niek Antonius Jacobus Maria, Verbraak, Harald Ernest, Beijsens, Rolf Theodorus Nicolaas, Van Asten, Nicolaas Antonius Allegondus Johannes, Seroglazov, Pavel, Feenstra, Kornelis Frits, Jilisen, Reinier Theodorus Martinus, Nikipelov, Andrey
• Format: Patent
• Language: English
• Published: 10.03.2020
• Subjects: ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; X-RAY TECHNIQUE

A radiation system to generate a radiation emitting plasma, the radiation system include a fuel emitter to provide a fuel target at a plasma formation region, a first laser arranged to provide a first laser beam at the plasma formation region incident on the fuel target to generate a radiation emitting plasma, an imaging device arranged to obtain a first image of the radiation emitting plasma at the plasma formation region, the first image indicating at least one image property of the radiation emitting plasma, and a controller. The controller is arranged to receive the first image, and to generate at least one instruction based on the at least one image property of the radiation emitting plasma to modify operation of at least one component of the radiation system to reduce a detrimental effect of debris.