Forming stacked twin III-V nano-sheets using aspect-ratio trapping techniques
A semiconductor structure that includes: a substrate, a twin vertical punch-through stopper layer structure connected to the substrate, and a plurality of nanosheets connected to and supported by the twin vertical punch-through stopper structure and isolated from the substrate by an insulating diele...
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Main Authors | , , , |
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Format | Patent |
Language | English |
Published |
28.01.2020
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Subjects | |
Online Access | Get full text |
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Summary: | A semiconductor structure that includes: a substrate, a twin vertical punch-through stopper layer structure connected to the substrate, and a plurality of nanosheets connected to and supported by the twin vertical punch-through stopper structure and isolated from the substrate by an insulating dielectric. |
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Bibliography: | Application Number: US201715834721 |