Semiconductor device

An SOI or PSOI device including a device structure having a plurality of doped semiconductor regions. One or more of the doped semiconductor regions is in electrical communication with one or more electrical terminals. The device further includes an insulator layer located between a bottom surface o...

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Bibliographic Details
Main Authors Pal, Deb Kumar, Tee, Elizabeth Kho Ching, Holke, Alexander Dietrich, Pilkington, Steven John
Format Patent
LanguageEnglish
Published 07.01.2020
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Summary:An SOI or PSOI device including a device structure having a plurality of doped semiconductor regions. One or more of the doped semiconductor regions is in electrical communication with one or more electrical terminals. The device further includes an insulator layer located between a bottom surface of the device structure and a handle wafer. The device has an insulator trench structure located between a side surface of the device structure and a lateral semiconductor region located laterally with respect to the device structure. The insulator layer and the insulator trench structure are configured to insulate the device structure from the handle wafer and the lateral semiconductor region, and the insulator trench structure includes a plurality of insulator trenches.
Bibliography:Application Number: US201213483569