Semiconductor device and method of manufacture
An etchant is utilized to remove a semiconductor material. In some embodiments an oxidizer is added to the etchant in order to react with surrounding semiconductor material and form a protective layer. The protective layer is utilized to help prevent damage that could occur from the other components...
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Main Authors | , , , , , |
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Format | Patent |
Language | English |
Published |
07.01.2020
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Subjects | |
Online Access | Get full text |
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Summary: | An etchant is utilized to remove a semiconductor material. In some embodiments an oxidizer is added to the etchant in order to react with surrounding semiconductor material and form a protective layer. The protective layer is utilized to help prevent damage that could occur from the other components within the etchant. |
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Bibliography: | Application Number: US201815966970 |