Method for producing an illumination system for an EUV projection exposure system, and illumination system
The disclosure relates to a method for producing an illumination system for an EUV apparatus in and to an illumination system for an EUV apparatus.
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Main Authors | , , , , , , , , |
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Format | Patent |
Language | English |
Published |
24.12.2019
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Subjects | |
Online Access | Get full text |
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Summary: | The disclosure relates to a method for producing an illumination system for an EUV apparatus in and to an illumination system for an EUV apparatus. |
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Bibliography: | Application Number: US201816114883 |