Object holder and lithographic apparatus

• Main Authors: Tromp, Siegfried Alexander, Lempens, Han Henricus Aldegonda, Jacobs, Johannes Henricus Wilhelmus, Simons, Wilhelmus Franciscus Johannes, Cortie, Rogier Hendrikus Magdalena, Bloks, Ruud Hendrikus Martinus Johannes, Vy, Van Vuong, Laurent, Thibault Simon Mathieu, Overkamp, Jim Vincent, Houben, Martijn, Lafarre, Raymond Wilhelmus Louis, Steffens, Koen, Polet, Theodorus Wilhelmus, Pieterse, Gerben
• Format: Patent
• Language: English
• Published: 19.11.2019
• Subjects: APPARATUS SPECIALLY ADAPTED THEREFOR; BASIC ELECTRIC ELEMENTS; CINEMATOGRAPHY; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; ELECTROGRAPHY; HOLOGRAPHY; MATERIALS THEREFOR; ORIGINALS THEREFOR; PHOTOGRAPHY; PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES; PHYSICS; SEMICONDUCTOR DEVICES

An object table to support an object, the object table having a support body, an object holder to hold an object, an opening adjacent an edge of the object holder, and a channel in fluid communication with the opening via a passageway, wherein the channel is defined by a first material which is different to a second material defining the passageway.