Object holder and lithographic apparatus

An object table to support an object, the object table having a support body, an object holder to hold an object, an opening adjacent an edge of the object holder, and a channel in fluid communication with the opening via a passageway, wherein the channel is defined by a first material which is diff...

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Bibliographic Details
Main Authors Tromp, Siegfried Alexander, Lempens, Han Henricus Aldegonda, Jacobs, Johannes Henricus Wilhelmus, Simons, Wilhelmus Franciscus Johannes, Cortie, Rogier Hendrikus Magdalena, Bloks, Ruud Hendrikus Martinus Johannes, Vy, Van Vuong, Laurent, Thibault Simon Mathieu, Overkamp, Jim Vincent, Houben, Martijn, Lafarre, Raymond Wilhelmus Louis, Steffens, Koen, Polet, Theodorus Wilhelmus, Pieterse, Gerben
Format Patent
LanguageEnglish
Published 19.11.2019
Subjects
APPARATUS SPECIALLY ADAPTED THEREFOR
BASIC ELECTRIC ELEMENTS
CINEMATOGRAPHY
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
ELECTROGRAPHY
HOLOGRAPHY
MATERIALS THEREFOR
ORIGINALS THEREFOR
PHOTOGRAPHY
PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES
PHYSICS
SEMICONDUCTOR DEVICES
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Summary:An object table to support an object, the object table having a support body, an object holder to hold an object, an opening adjacent an edge of the object holder, and a channel in fluid communication with the opening via a passageway, wherein the channel is defined by a first material which is different to a second material defining the passageway.
Bibliography:Application Number: US201815918478