Substrate liquid processing apparatus, and control method of heater unit

A control device configured to control a power to be supplied to a heater unit. The control device cuts off the power to be supplied to a heating portion when it is determined that an event where a maximum temperature that the processing liquid within the heater unit reaches exceeds a processing liq...

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Bibliographic Details
Main Authors Nakayama, Hisakazu, Ojima, Tomoaki
Format Patent
LanguageEnglish
Published 24.09.2019
Subjects
BASIC ELECTRIC ELEMENTS
BLASTING
CONTROLLING
ELECTRIC HEATING
ELECTRIC LIGHTING NOT OTHERWISE PROVIDED FOR
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
FLUID HEATERS, e.g. WATER OR AIR HEATERS, HAVING HEATGENERATING MEANS, IN GENERAL
HEATING
LIGHTING
MECHANICAL ENGINEERING
PHYSICS
RANGES
REGULATING
SEMICONDUCTOR DEVICES
SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
VENTILATING
WEAPONS
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Summary:A control device configured to control a power to be supplied to a heater unit. The control device cuts off the power to be supplied to a heating portion when it is determined that an event where a maximum temperature that the processing liquid within the heater unit reaches exceeds a processing liquid upper limit temperature is likely to occur even when a supply of the power to the heating portion is stopped based on an actual temperature of the processing liquid measured by a temperature detector under an assumption that a flow of the processing liquid flowing in a processing liquid supply line is stopped.
Bibliography:Application Number: US201615089662