Substrate transfer robot

A substrate transfer robot includes a base, a column provided on the base, a number of robotic arm groups protruding from the column in different directions. Each of the number of robotic arm groups includes at least one robotic arm and elevating mechanisms. The elevating mechanisms correspond to th...

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Bibliographic Details
Main Authors Wang, Jie, Shen, Erfeng, Ren, Qingshuang
Format Patent
LanguageEnglish
Published 10.09.2019
Subjects
BASIC ELECTRIC ELEMENTS
CHAMBERS PROVIDED WITH MANIPULATION DEVICES
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
HAND TOOLS
MANIPULATORS
PERFORMING OPERATIONS
PORTABLE POWER-DRIVEN TOOLS
SEMICONDUCTOR DEVICES
TRANSPORTING
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Summary:A substrate transfer robot includes a base, a column provided on the base, a number of robotic arm groups protruding from the column in different directions. Each of the number of robotic arm groups includes at least one robotic arm and elevating mechanisms. The elevating mechanisms correspond to the robotic arm groups one by one and are fixedly connected to the robotic arm groups. The number of robotic arm groups can be driven by the respective elevating mechanisms, to move in a longitudinal direction of the column respectively. The substrate transfer robot can improve the handling efficiency.
Bibliography:Application Number: US201715838082