Direct probing characterization vehicle for transistor, capacitor and resistor testing

• Main Authors: Huang, Cho-Si, Doong, Yih-Yuh, Michaels, Kimon, Eisenmann, Hans, Shen, Tzupin, Lin, Chia-Chi, Lin, Sheng-Che, Hess, Christopher
• Format: Patent
• Language: English
• Published: 13.08.2019
• Subjects: CALCULATING; COMPUTING; COUNTING; ELECTRIC DIGITAL DATA PROCESSING; PHYSICS

A method is disclosed for designing a test vehicle utilizing a layout of a real integrated circuit (IC) product. The method comprises: importing an original full-chip layout of the real IC product; partitioning the original full-chip layout into probe groups, each probe group comprising probe pads, and, a plurality of IC devices within an area of interest (AOI) having original routing interconnect for those IC devices; selecting a set of IC devices within the AOI; and, for the selected set of IC devices, using pattern extraction to remove the original routing interconnect, and create customized interconnect layers (CIL) to reconfigure connection between the individual IC devices. Incorporating the selected set of IC devices with the CIL into the original full-chip layout creates a modified full-chip layout such that a wafer fabricated using the modified full-chip layout comprises a real product with a built-in test vehicle.