Bonded substrate, surface acoustic wave element, surface acoustic wave device, and method of manufacturing bonded substrate

There is provided a bonded substrate including: a quartz substrate; and a piezoelectric substrate which is bonded on the quartz substrate and on which a surface acoustic wave propagates, wherein the quartz substrate and the piezoelectric substrate are bonded at a bonding interface through covalent b...

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Main Authors Kayano, Rinzo, Mizuno, Jun, Kurimoto, Kouhei, Kishida, Kazuhito, Kakio, Shoji
Format Patent
LanguageEnglish
Published 02.07.2019
Subjects
BASIC ELECTRONIC CIRCUITRY
ELECTRICITY
IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS
RESONATORS
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Abstract There is provided a bonded substrate including: a quartz substrate; and a piezoelectric substrate which is bonded on the quartz substrate and on which a surface acoustic wave propagates, wherein the quartz substrate and the piezoelectric substrate are bonded at a bonding interface through covalent bonding, and a surface acoustic wave element having a higher phase velocity and a higher electromechanical coupling factor than conventional one is obtained by disposing an interdigital electrode on a principal surface of the piezoelectric substrate.
AbstractList There is provided a bonded substrate including: a quartz substrate; and a piezoelectric substrate which is bonded on the quartz substrate and on which a surface acoustic wave propagates, wherein the quartz substrate and the piezoelectric substrate are bonded at a bonding interface through covalent bonding, and a surface acoustic wave element having a higher phase velocity and a higher electromechanical coupling factor than conventional one is obtained by disposing an interdigital electrode on a principal surface of the piezoelectric substrate.
Author Kayano, Rinzo
Kurimoto, Kouhei
Kakio, Shoji
Mizuno, Jun
Kishida, Kazuhito
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RelatedCompanies Kurimoto Kouhei
WASEDA UNIVERSITY
THE JAPAN STEEL WORKS, LTD
Kayano Rinzo
Kishida Kazuhito
UNIVERSITY OF YAMANASHI
Kakio Shoji
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Snippet There is provided a bonded substrate including: a quartz substrate; and a piezoelectric substrate which is bonded on the quartz substrate and on which a...
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SubjectTerms BASIC ELECTRONIC CIRCUITRY
ELECTRICITY
IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS
RESONATORS
Title Bonded substrate, surface acoustic wave element, surface acoustic wave device, and method of manufacturing bonded substrate
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