Single sensor type three-dimensional micro/nano contact trigger measuring probe

• Main Authors: Chen, Chen, Fan, Kuangchao, Li, Ruijun, Cheng, Zhenying
• Format: Patent
• Language: English
• Published: 14.05.2019
• Subjects: ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVEREDIN A SINGLE OTHER SUBCLASS; MEASURING; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS; MEASURING LENGTH, THICKNESS OR SIMILAR LINEARDIMENSIONS; MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR; PHYSICS; TARIFF METERING APPARATUS; TESTING

A single sensor type three-dimensional micro/nano contact trigger measuring probe is provided which is characterized in respectively providing a probe unit and a measuring unit in the base. In the probe unit, the leaf spring is supported on the circular-ring base, a circular suspension plate is provided on the leaf spring, and beam splitter prisms and wedge block are fixedly provided on the circular suspension plate. The stylus and the circular suspension plate are fixedly connected in a "T" shape. The measuring unit projects the straight light emitted by a laser device through the beam splitter prisms and wedge block and then the straight light is focused on the four-quadrant detector. Measuring the offset of the probe by the four-quadrant detector, in such a manner that single sensor type three-dimensional micrometer contact trigger measurement is achieved.