Sensor chip stack and method of producing a sensor chip stack

The sensor chip stack comprises a sensor substrate of a semiconductor material including a sensor, a chip fastened to the sensor substrate, the chip including an integrated circuit, electric interconnections between the sensor substrate and the chip, electric terminals of the chip, the chip being ar...

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Bibliographic Details
Main Authors Parteder, Georg, Fitzi, Andreas, Schrank, Franz, Troxler, Thomas, Kraft, Jochen
Format Patent
LanguageEnglish
Published 26.03.2019
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Summary:The sensor chip stack comprises a sensor substrate of a semiconductor material including a sensor, a chip fastened to the sensor substrate, the chip including an integrated circuit, electric interconnections between the sensor substrate and the chip, electric terminals of the chip, the chip being arranged between the electric terminals and the sensor substrate, and a molding material arranged adjacent to the chip, the electric terminals of the chip being free from the molding material.
Bibliography:Application Number: US201715636545