Self-aligned nanotube structures

The present disclosure generally relates to semiconductor structures and, more particularly, to self-aligned nanotube structures and methods of manufacture. The structure includes at least one nanotube structure supported by a plurality of spacers and an insulator material between the spacers and co...

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Bibliographic Details
Main Authors Collins, Christopher, Schepis, Dominic, Kwon, Oh-Jung, Ortolland, Claude
Format Patent
LanguageEnglish
Published 01.01.2019
Subjects
BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
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Summary:The present disclosure generally relates to semiconductor structures and, more particularly, to self-aligned nanotube structures and methods of manufacture. The structure includes at least one nanotube structure supported by a plurality of spacers and an insulator material between the spacers and contacting the at least one nanotube structure.
Bibliography:Application Number: US201715793621